| Shelfclass_id | 6.G |
| Sortkey | ICMTS |
| Authors | IEEE Electron Devices Society |
| Title | ICMTS 1993: ICMTS 93: The 1993 IEEE International Conference on Microelectronic Test Structures: March 22-25, 1993, Sitges, Barcelona, Spain |
| Publisher | Institute of Electrical and Electronics Engineers |
| Year | 1992 |
| Languages | eng |
| Isbn | 0780308573 |
| Description | xv, 298 p. 30 cm |
| Record date | 20110531 |
| Location | New York |