| Shelfclass_id | 6.B |
| Sortkey | SRINIVASAN, G.R |
| Authors | G.R Shrinivasan, G.R SRINIVASAN |
| Title | Process Physics and Modeling in Semiconductor Technology: Proceedings of the Second International Symposium.Volume 91-4 |
| Publisher | The Electrochemical Society |
| Year | 1991 |
| Languages | eng |
| Record date | 20081112 |
| Location | Princeton, N.J. |