Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications

Shelfclass_id	6.B
Sortkey	SHERMAN, ARTHUR
Authors	Arthur Sherman
Title	Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications
Publisher	Noyes Publications
Year	c1987
Languages	eng
Isbn	0815511361
Series	Materials science and process technology series
Description	xi, 215 p. ill. 25 cm.
Record date	20081017
Location	Park Ridge, N.J., U.S.A.
Keywords	Vapor-plating, Integrated circuits
Urlnote	Publisher description
Urls	http://www.loc.gov/catdir/description/wap041/87011277.html