| Shelfclass_id | 6.B |
| Sortkey | S/ SEMICONDUCTORS |
| Authors | R. K. Willardson, Albert C. Beer, James F. Gibbons |
| Title | Semiconductors and semimetals: volume 17: CW beam processing of silicon and other semiconductors |
| Publisher | Academic Press |
| Year | 1984 |
| Languages | eng |
| Isbn | 0127521178 |
| Series | Semiconductors and semimetals |
| Volume | 17 |
| Record date | 20060810 |
| Location | New York & London |