| Shelfclass_id | 6.B |
| Sortkey | S/ SEMICONDUCTORS |
| Authors | R. K. Willardson, Eicke B. Weber, Danilo Crippa, Daniel L. Rode, Maurizio Masi |
| Title | Semiconductors and semimetals: volume 72: silicon epitaxy |
| Publisher | Academic Press |
| Year | 2001 |
| Languages | eng |
| Isbn | 012752181X |
| Series | Semiconductors and semimetals |
| Volume | 72 |
| Record date | 20060810 |
| Location | New York & London |