| Shelfclass_id | 6.B |
| Sortkey | S/ SEMICONDUCTORS |
| Authors | R. K. Willardson, Eicke B. Weber, Shin Hwa Li, Robert O. Miller |
| Title | Semiconductors and semimetals: volume 63: chemical mechanical polishing in silicon processing |
| Publisher | Academic Press |
| Year | 2000 |
| Languages | eng |
| Isbn | 0127521720 |
| Series | Semiconductors and semimetals |
| Volume | 63 |
| Record date | 20060810 |
| Location | New York & London |