| Shelfclass_id | 6.B |
| Sortkey | RUNYAN, WALTER R |
| Authors | Walter R. Runyan, Kenneth E. Bean |
| Title | Semiconductor Integrated Circuit Processing Technology |
| Publisher | Addison-Wesley |
| Year | 1994 (c1990) |
| Languages | eng |
| Isbn | 0201108313, 9780201108316 |
| Series | Addison-Wesley series in electrical and computer engineering |
| Description | xviii, 683 p. ill. 25 cm. |
| Record date | 20100115 |
| Location | Reading, Mass. |
| Keywords | Integrated circuits, Semiconductors |