| Shelfclass_id | 6.B |
| Sortkey | MCGUIRE, GARY E |
| Authors | Gary E. McGuire |
| Title | Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI) |
| Publisher | Noyes Publications |
| Year | c1988 |
| Languages | eng |
| Isbn | 0815511507 |
| Series | Materials science and process technology series |
| Description | xiii, 675 p. ill. 25 cm. |
| Record date | 20061108 |
| Location | Park Ridge, N.J., U.S.A. |
| Keywords | Integrated circuits |
| Urlnote | Publisher description |
| Urls | http://www.loc.gov/catdir/description/wap041/87031529.html |