| Shelfclass_id | 6.B |
| Sortkey | MANOS, DENNIS M |
| Authors | Dennis M. Manos, Daniel L. Flamm |
| Title | Plasma Etching: An Introduction |
| Publisher | Academic Press |
| Year | c1989 |
| Languages | eng |
| Isbn | 0124693709 |
| Series | Plasma - materials interactions |
| Description | (alk. paper) xii, 476 p. ill. 24 cm |
| Record date | 20060809 |
| Location | Boston |
| Keywords | Plasma etching |
| Urlnote | Table of contents |
| Urls | http://www.loc.gov/catdir/toc/els031/87037419.html |