| Shelfclass_id | 6.B |
| Sortkey | LEVINSON, HARRY J |
| Authors | Harry J. Levinson |
| Title | Lithography Process Control |
| Publisher | SPIE Optical Engineering Press |
| Year | c1999 |
| Languages | eng |
| Isbn | 0819430528 |
| Series | Tutorial texts in optical engineering |
| Volume | 28 |
| Description | x, 190 p. ill. 26 cm |
| Record date | 20060809 |
| Location | Bellingham, Wash. |
| Keywords | Semiconductors, Microlithography |