| Shelfclass_id | 6.B |
| Sortkey | GUPTA, DINES C |
| Authors | Dines C Gupta, Paul H Langer |
| Title | Emerging Semiconductor Technology: A Symposium |
| Publisher | American Society for Testing and Materials |
| Year | c1987 |
| Languages | eng |
| Isbn | 0803104596 |
| Series | ASTM special technical publication |
| Volume | 960 |
| Description | 704 p. ill. 24 cm. |
| Record date | 20081013 |
| Location | Philadelphia, PA |
| Keywords | Semiconductor industry, Semiconductors |
| Notes | Papers presented at the Fourth International Symposium on Semiconductor Processing. |