| Shelfclass_id | 6.B |
| Sortkey | ELLIOTT, DAVID J |
| Authors | David J Elliott |
| Title | Integrated Circuit Fabrication Technology |
| Publisher | McGraw-Hill |
| Edition | 2. ed. |
| Year | cop. 1989 |
| Languages | eng |
| Isbn | 0070193398 |
| Description | xvi, 540 s. ill. |
| Record date | 20080922 |
| Location | New York |
| Keywords | Tillverkning av integrerade kretsar, Manufacture of integrated circuits, Integrated circuits |