| Shelfclass_id | 6.B |
| Sortkey | CMP-MIC/05 |
| Title | 2005 Proceedings Ninth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC): February 23-25, 2005. Marriott Hotel Fremint, CA. CMP-MIC Catalog No. 05 IMIC-1000P. |
| Publisher | CMP-MIC |
| Year | 2005 |
| Languages | eng |
| Record date | 20090309 |
| Location | Tampa |