| Shelfclass_id | 6.B |
| Sortkey | CASPER, LAWRENCE A |
| Authors | Lawrence A. Casper |
| Title | Microelectronics Processing: Inorganic Materials Characterization |
| Publisher | American Chemical Society |
| Year | 1986 |
| Languages | eng |
| Isbn | 0841209340 |
| Series | ACS symposium series |
| Volume | 295 |
| Issn | 0097-6156 |
| Description | x, 443 p. ill. 24 cm. |
| Record date | 20090824 |
| Location | Washington, DC |
| Keywords | Microelectronics |
| Urlnote | Table of contents only |
| Urls | http://www.loc.gov/catdir/enhancements/fy0604/85030648-t.html |