| Shelfclass_id | 6.B |
| Sortkey | BURGER, R. M |
| Authors | R. M. Burger, R. P. Donovan |
| Title | Fundamentals of Silicon Integrated Device Technology: Volume 1: Oxidation, Diffusion and Epitaxy |
| Publisher | Prentice Hall |
| Year | 1967 |
| Languages | eng |
| Series | Solid state physical electronics series |
| Description | illus., col. plates 24 cm |
| Record date | 20060809 |
| Location | Englewood Cliffs, N.J. |
| Keywords | Microelectronics, Silicon |