| Shelfclass_id | 6.B |
| Sortkey | BRILLSON, L. J |
| Authors | L. J. Brillson |
| Title | Frontiers in Electronic Materials & Processing: Houston, Texas, November 1985 |
| Publisher | American Institute of Physics |
| Year | 1986 |
| Languages | eng |
| Isbn | 0883183374 |
| Series | American Vacuum Society series AIP conference proceedings |
| Volume | 138 |
| Issn | 99-0585435 |
| Description | 338 p. ill. 25 cm. |
| Record date | 20100115 |
| Location | New York |
| Keywords | Semiconductors, Microelectronics |
| Notes | Proceedings of the Frontiers in Electronic Materials and Processing Conference held Nov. 19-21, 1985. |