| Shelfclass_id | 6.B |
| Sortkey | BREWER, GEORGE R |
| Authors | George R. Brewer |
| Title | Electron-Beam Technology in Microelectronic Fabrication |
| Publisher | Academic Press |
| Year | 1980 |
| Languages | eng |
| Isbn | 012133550X |
| Description | xi, 362 p. ill. 24 cm. |
| Record date | 20090929 |
| Location | New York |
| Keywords | Microelectronics, Lithography, Electron beam |